Fabrication of graphene-based flexible devices utilizing a soft lithographic patterning method

There has been considerable interest in soft lithographic patterning processing of large scale graphene sheets due to the low cost and simplicity of the patterning process along with the exceptional electrical or physical properties of graphene. These properties include an extremely high carrier mob...

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Veröffentlicht in:Nanotechnology 2014-07, Vol.25 (28), p.1-6
Hauptverfasser: Jung, Min Wook, Myung, Sung, Kim, Ki Woong, Song, Wooseok, Jo, You-Young, Lee, Sun Suk, Lim, Jongsun, Park, Chong-Yun, An, Ki-Seok
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Sprache:eng
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Zusammenfassung:There has been considerable interest in soft lithographic patterning processing of large scale graphene sheets due to the low cost and simplicity of the patterning process along with the exceptional electrical or physical properties of graphene. These properties include an extremely high carrier mobility and excellent mechanical strength. Recently, a study has reported that single layer graphene grown via chemical vapor deposition (CVD) was patterned and transferred to a target surface by controlling the surface energy of the polydimethylsiloxane (PDMS) stamp. Herein, we developed a soft lithographic patterning process via surface energy modification for advanced graphene-based flexible devices such as transistors or chemical sensors. Significantly, this soft lithographic patterning technique enables us to demonstrate a simple and efficient chemical sensor based on reduced graphene oxide (rGO), a metallic nanoparticle composite, and an attachable graphene-based device on a silk fibroin thin film.
ISSN:0957-4484
1361-6528
DOI:10.1088/0957-4484/251281285302