Study of a MEMS Short-Circuit Fuse Based on Electro-Thermal Theory

With development of MEMS pyrotechnics devices such as semiconductor bridge/metal bridges, the energy required to fuze ignition becomes smaller and smaller. The energy needed for traditional short-circuit is far greater than MEMS pyrotechnics devices explosive, and takes a large space of fuze, which does not accord with the smaller trend in fuse volume and ignition energy. This paper describes a MEMS short-circuit fuse based on electro-thermal theory, it has similar volume with MEMS pyrotechnics devices, and the energy required is less than the traditional shorts fuse. This short-circuit fuse has well safety features, short action time, small volume, low cost, and it is suitable to be used in fuse or other areas .