Fabrication of Self-Supported Al/Polyimide/Al Film with Thick Supporting Nickel Mesh
We present the fabrication of submicron polyimide film sandwiched by Al film. The preparation in two-step method and spin-coating parameters of submicron polyimide film are described. To achieve self-supported structure, thick nickel mesh (ca. 200 μm) was introduced by micro-electroforming. Using ne...
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| Veröffentlicht in: | Applied Mechanics and Materials 2013-02, Vol.290 (Spacecraft Structures, Materials and Mechanical Testing), p.21-24 |
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| container_issue | Spacecraft Structures, Materials and Mechanical Testing |
| container_start_page | 21 |
| container_title | Applied Mechanics and Materials |
| container_volume | 290 |
| creator | Yin, Guo He Sun, Qing Rong Wang, Yu Sa Yang, Yan Ji Cui, Wei Wei Huo, Jia Zhang, Zi Liang Li, Cheng Kui Lu, Bo Zhu, Yue Li, Wei Wang, Juan Chen, Yong Li, Mao Shun Zhang, Yi Liu, Xiao Yan Liu, Yan Chen, Tian Xiang Han, Da Wei Wu, Di Hu, Wei |
| description | We present the fabrication of submicron polyimide film sandwiched by Al film. The preparation in two-step method and spin-coating parameters of submicron polyimide film are described. To achieve self-supported structure, thick nickel mesh (ca. 200 μm) was introduced by micro-electroforming. Using negative tone photoresist SU-8 2150, the nickel grid width was demonstrated in good agreement with its original design value with optical microscopy. |
| doi_str_mv | 10.4028/www.scientific.net/AMM.290.21 |
| format | Article |
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The preparation in two-step method and spin-coating parameters of submicron polyimide film are described. To achieve self-supported structure, thick nickel mesh (ca. 200 μm) was introduced by micro-electroforming. Using negative tone photoresist SU-8 2150, the nickel grid width was demonstrated in good agreement with its original design value with optical microscopy.</description><identifier>ISSN: 1660-9336</identifier><identifier>ISSN: 1662-7482</identifier><identifier>ISBN: 9783037856338</identifier><identifier>ISBN: 3037856335</identifier><identifier>EISSN: 1662-7482</identifier><identifier>DOI: 10.4028/www.scientific.net/AMM.290.21</identifier><language>eng</language><publisher>Zurich: Trans Tech Publications Ltd</publisher><subject>Accuracy ; Aluminum ; Nickel ; Optical microscopy ; Photoresists ; Polyimide resins ; Thick films</subject><ispartof>Applied Mechanics and Materials, 2013-02, Vol.290 (Spacecraft Structures, Materials and Mechanical Testing), p.21-24</ispartof><rights>2013 Trans Tech Publications Ltd</rights><rights>Copyright Trans Tech Publications Ltd. Feb 2013</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c3341-4a94a8c1ef741408033414d9cddeb80393aaebd5d554cb872b67a8f1a27aabcf3</citedby><cites>FETCH-LOGICAL-c3341-4a94a8c1ef741408033414d9cddeb80393aaebd5d554cb872b67a8f1a27aabcf3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Uhttps://www.scientific.net/Image/TitleCover/2278?width=600</thumbnail><link.rule.ids>314,776,780,27901,27902</link.rule.ids></links><search><creatorcontrib>Yin, Guo He</creatorcontrib><creatorcontrib>Sun, Qing Rong</creatorcontrib><creatorcontrib>Wang, Yu Sa</creatorcontrib><creatorcontrib>Yang, Yan Ji</creatorcontrib><creatorcontrib>Cui, Wei Wei</creatorcontrib><creatorcontrib>Huo, Jia</creatorcontrib><creatorcontrib>Zhang, Zi Liang</creatorcontrib><creatorcontrib>Li, Cheng Kui</creatorcontrib><creatorcontrib>Lu, Bo</creatorcontrib><creatorcontrib>Zhu, Yue</creatorcontrib><creatorcontrib>Li, Wei</creatorcontrib><creatorcontrib>Wang, Juan</creatorcontrib><creatorcontrib>Chen, Yong</creatorcontrib><creatorcontrib>Li, Mao Shun</creatorcontrib><creatorcontrib>Zhang, Yi</creatorcontrib><creatorcontrib>Liu, Xiao Yan</creatorcontrib><creatorcontrib>Liu, Yan</creatorcontrib><creatorcontrib>Chen, Tian Xiang</creatorcontrib><creatorcontrib>Han, Da Wei</creatorcontrib><creatorcontrib>Wu, Di</creatorcontrib><creatorcontrib>Hu, Wei</creatorcontrib><title>Fabrication of Self-Supported Al/Polyimide/Al Film with Thick Supporting Nickel Mesh</title><title>Applied Mechanics and Materials</title><description>We present the fabrication of submicron polyimide film sandwiched by Al film. 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Using negative tone photoresist SU-8 2150, the nickel grid width was demonstrated in good agreement with its original design value with optical microscopy.</description><subject>Accuracy</subject><subject>Aluminum</subject><subject>Nickel</subject><subject>Optical microscopy</subject><subject>Photoresists</subject><subject>Polyimide resins</subject><subject>Thick films</subject><issn>1660-9336</issn><issn>1662-7482</issn><issn>1662-7482</issn><isbn>9783037856338</isbn><isbn>3037856335</isbn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2013</creationdate><recordtype>article</recordtype><sourceid>BENPR</sourceid><recordid>eNqNkctKAzEUhoMX8PoOARHczDS3mSQLkVKsClYF6zpkMhkbTWdqMqX49qZWUNzoKpyc7_zJ4QPgFKOcISIGq9Uqj8bZtneNM3lr-8FwMsmJRDnBW2AflyXJOBNkGxxLLiiiXBQlpWLns4cySWm5Bw5ifEGoZJiJfTAd6yo4o3vXtbBr4KP1Tfa4XCy60NsaDv3gofPvbu5qOxh6OHZ-Dleun8HpzJlX-EW69hnepdp6OLFxdgR2G-2jPf46D8HT-HI6us5u769uRsPbzFDKcMa0ZFoYbBuePoMEWt-yWpq6tlWqJNXaVnVRFwUzleCkKrkWDdaEa12Zhh6Cs03uInRvSxt7NXfRWO91a7tlVLjkXAossfwbZUxwVuCCJfTkF_rSLUObFkkURURSQteB5xvKhC7GYBu1CG6uw7vCSK11qaRLfetSSZdKulTSpQhO8xeb-T7oNvbWzH4886-ED3a8ouQ</recordid><startdate>20130201</startdate><enddate>20130201</enddate><creator>Yin, Guo He</creator><creator>Sun, Qing Rong</creator><creator>Wang, Yu Sa</creator><creator>Yang, Yan Ji</creator><creator>Cui, Wei Wei</creator><creator>Huo, Jia</creator><creator>Zhang, Zi Liang</creator><creator>Li, Cheng Kui</creator><creator>Lu, Bo</creator><creator>Zhu, Yue</creator><creator>Li, Wei</creator><creator>Wang, Juan</creator><creator>Chen, Yong</creator><creator>Li, Mao Shun</creator><creator>Zhang, Yi</creator><creator>Liu, Xiao Yan</creator><creator>Liu, Yan</creator><creator>Chen, Tian Xiang</creator><creator>Han, Da Wei</creator><creator>Wu, Di</creator><creator>Hu, Wei</creator><general>Trans Tech Publications Ltd</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>7TB</scope><scope>8BQ</scope><scope>8FD</scope><scope>8FE</scope><scope>8FG</scope><scope>ABJCF</scope><scope>ABUWG</scope><scope>AFKRA</scope><scope>BENPR</scope><scope>BFMQW</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>D1I</scope><scope>DWQXO</scope><scope>FR3</scope><scope>HCIFZ</scope><scope>JG9</scope><scope>KB.</scope><scope>KR7</scope><scope>L6V</scope><scope>M7S</scope><scope>PDBOC</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PRINS</scope><scope>PTHSS</scope><scope>7QF</scope></search><sort><creationdate>20130201</creationdate><title>Fabrication of Self-Supported Al/Polyimide/Al Film with Thick Supporting Nickel Mesh</title><author>Yin, Guo He ; 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The preparation in two-step method and spin-coating parameters of submicron polyimide film are described. To achieve self-supported structure, thick nickel mesh (ca. 200 μm) was introduced by micro-electroforming. Using negative tone photoresist SU-8 2150, the nickel grid width was demonstrated in good agreement with its original design value with optical microscopy.</abstract><cop>Zurich</cop><pub>Trans Tech Publications Ltd</pub><doi>10.4028/www.scientific.net/AMM.290.21</doi><tpages>4</tpages></addata></record> |
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| ispartof | Applied Mechanics and Materials, 2013-02, Vol.290 (Spacecraft Structures, Materials and Mechanical Testing), p.21-24 |
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| subjects | Accuracy Aluminum Nickel Optical microscopy Photoresists Polyimide resins Thick films |
| title | Fabrication of Self-Supported Al/Polyimide/Al Film with Thick Supporting Nickel Mesh |
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