Modeling and machining evaluation of microstructure fabrication by fast tool servo-based diamond machining

•A particular microstructure was generated by fast tool servo-based diamond machining.•Method for calculating this microstructure profile amplitude and wavelength was introduced when the clearance angle of the cutting tool is smaller than the critical angle.•Burrs formation decreases with the microstructure profile wavelength increasing. A fast-tool servo-machining process is typically utilized to generate sinusoidal microstructures for optical components only when the clearance angle of the cutting tool is greater than the critical value. This paper focuses on the generation characteristics of microstructures for surface texturing applications when the clearance angle of the cutting tool is smaller than this critical angle. A method for calculating the microstructure profile amplitude and wavelength is introduced for the prediction of microstructure generation. Cutting tests were conducted, and the measured results were quite close to the corresponding calculated results, further verifying the capability of the proposed analytical model.