Graphene and carbon nanotube (CNT) in MEMS/NEMS applications

Carbon based nanomaterials, including one-dimensional carbon nanotubes (CNTs) and two-dimensional graphene, have attracted great research interests in recent years for various potential applications using the unique mechanical, electrical, optical and chemical properties. Specifically, the large surface area-to-volume ratio of these carbon-based material make them prime candidates for sensing applications in MEMS (Microelectromechanical Systems) and NEMS (Nanoelectromechanical Systems) devices. Here, we review the key electrical and mechanical properties of graphene with the focuses on their applications in sensors and actuators. State-of-art synthesis processes for graphene and CNTs are discussed since continuous advancements in their fabrication process are vital for the commercialization of graphene- or CNT-based products. Examples of graphene and CNT in MEMS/NEMS applications such as electronic components, mass/gas sensors, supercapacitors, and others are introduced and the advantages and challenges for graphene and CNTs based devices are discussed. Before these materials can be successfully utilized in MEMS/NEMS systems, effective integration processes with high yield have to be established. Approaches and discussions and are briefed in the future prospects of the paper.