Growth of Nanowires by High-Temperature Glancing Angle Deposition

We have demonstrated that nanowires of various metals, Ge, and Ga 2 O 3 can be grown by high-temperature glancing angle deposition (HT-GLAD). The nanowires of metals including Al, Cu, Ag, Au, Mn, Fe, Co, Ni, and Zn are self-catalyzed, while the nanowires of other materials such as Ge and Ga 2 O 3 ar...

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Veröffentlicht in:Japanese Journal of Applied Physics 2013-11, Vol.52 (11), p.110116-110116-6
Hauptverfasser: Suzuki, Motofumi, Minamitake, Haruhiko, Kita, Ryo, Hamachi, Kenji, Hara, Hideki, Nakajima, Kaoru, Kimura, Kenji, Hsu, Chia-Wei, Chou, Li-Jen
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Sprache:eng
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Zusammenfassung:We have demonstrated that nanowires of various metals, Ge, and Ga 2 O 3 can be grown by high-temperature glancing angle deposition (HT-GLAD). The nanowires of metals including Al, Cu, Ag, Au, Mn, Fe, Co, Ni, and Zn are self-catalyzed, while the nanowires of other materials such as Ge and Ga 2 O 3 are catalyzed by Au nanoparticles. However, once the nanowires start to grow, the growth modes of the HT-GLAD nanowires are fundamentally the same, i.e., nanowires with uniform diameter grow only when the vapor is incident at a very high glancing angle and reach a length larger than 1--8 μm even though the number of deposited atoms corresponds to the average thickness of 20--30 nm. This suggests that there is a universal growth mechanism for the nanowires grown by HT-GLAD.
ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.52.110116