Transparent diamond electrodes for tunable micro-optical devices

Boron-doped nanocrystalline diamond (NCD:B) elastic layers combined with aluminum nitride (AlN) piezo-actuators are well suitable for ultrathin, highly transparent and mechanically stable micro-optical devices operating at high frequencies. In such unimorph structures NCD:B layers serve as advanced transparent electrodes instead of commonly used indium tin oxide. The carrier transport properties of heavily p-doped NCD thin films are characterized by temperature-dependent voltage-current and Hall measurements. In addition, the piezo-driven aspheric deformation of NCD:B/AlN micro lenses is demonstrated by means of integrated multi-sector actuators. •The electrical and optical properties of boron-doped NCD layers were investigated.•Boron-doped NCD layers show specific conductivity of 50–60 (Ω cm)−1.•We fabricated piezo-actuated micro lenses with multi-segment structure.•Realization of 3-dimensional arbitrary aspheric deformation of lens surface.•We show independent functionality of piezo-driven boron-doped NCD sector.