Fabrication of micro patterns using a drawing system with an air-pulse-type dispenser

Microstructures and micropatterns with unique functions are applied to electric sensor devices and medical devices. To fabricate mu m order micropatterns, this report describes the drawing characteristics of a drawing system with an air-pulse-type dispenser and the profile accuracy of micropatterns...

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Veröffentlicht in:	Journal of the Japan Society for Abrasive Technology 2013-11, Vol.56 (5), p.331-335
Hauptverfasser:	Yoshitomi, Kenichiro, Une, Atsunobu, Mochida, Masaaki
Format:	Artikel
Sprache:	eng
Schlagworte:	Abrasives Dispensers Medical devices Microstructure Nozzles Polymers Workpieces
Online-Zugang:	Volltext
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