Fabrication of micro patterns using a drawing system with an air-pulse-type dispenser

Microstructures and micropatterns with unique functions are applied to electric sensor devices and medical devices. To fabricate mu m order micropatterns, this report describes the drawing characteristics of a drawing system with an air-pulse-type dispenser and the profile accuracy of micropatterns using a high-viscosity UV resin of about 10000 cP. For fabrication of dot patterns, the gap between the nozzle and the workpiece was shown to markedly affect the drawing accuracy. In addition, pins were fabricated with top flatness of less than 1 mu m using this drawing system and grinding machining. For fabrication of line patterns, the relationships between drawing accuracy and drawing conditions, drawing speed, gap, and air-pulse pressure were clarified. Under optimized drawing conditions, the edge unevenness and the height accuracy of the line pattern became 2 mu m and plus or minus 2 mu m, respectively.