A 3-DOF Friction-Free Planar Motor Using Piezoelectric Elements

A friction-free planar motor, which is composed of piezoelectric elements (piezos), is proposed. The motor is based on the principle of an inchworm using levitation mechanisms. The vertical vibration of the piezo generates the levitation force of the motor. The horizontal deformation of the piezo causes the thrust force of the motor. These piezos realizes three degree-of-freedom motion on a flat surface. We measure the displacement in the vertical and horizontal direction of the levitation mechanism. The feasibility of the inchworm using levitation mechanisms is described.