Features of Transmission EBSD and its Application

Features of transmission electron backscatter diffraction (EBSD) observation with a standard EBSD ( s -EBSD) detector are surveyed in this study. Heavily deformed Al and 8Cr tempered martensite transmission electron microscope (TEM) specimens were used for this study. It is shown that a specimen tilt angle of ~30°–40° in the opposite direction of the usual 70° and a smaller working distance in the range 4 mm–5 mm are recommended when using a s -EBSD detector. Specimen thickness and accelerating voltage (Acc.V) have a strong affect on the quality of transmission EBSD patterns and orientation maps. Higher Acc.Vs are generally recommended to get good quality orientation maps. In case of very thin specimens, lowering the Acc.Vs will give better results. In the observation of a thin film of an 8Cr tempered martensite steel specimen, it is confirmed that t -EBSD can provide images and detailed quantitative orientation data comparable with that obtained by TEM. It is also shown that small precipitates of Cr 23 C 6 with sizes around 30 nm could be detected and their orientations measured.