Towards liquid metal ion source chips: Indium liquid metal ion source with glass microcapillaries
A liquid-metal-ion-source with indium propellant using an uncoated fused quartz glass microcapillary was manufactured and tested. The extremely thin capillary enabled a very low ignition voltage of 1000 V and a high electrical impedance ideal for clustering. However, low bonding forces between indiu...
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| Veröffentlicht in: | Applied physics letters 2013-01, Vol.102 (2) |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
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| Online-Zugang: | Volltext |
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| Zusammenfassung: | A liquid-metal-ion-source with indium propellant using an uncoated fused quartz glass microcapillary was manufactured and tested. The extremely thin capillary enabled a very low ignition voltage of 1000 V and a high electrical impedance ideal for clustering. However, low bonding forces between indium and glass resulted in a rather short lifetime of little more than 10 min. The use of pure glass as emitter material may enable liquid ion source chips with high current densities in the future. |
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| ISSN: | 0003-6951 1077-3118 |
| DOI: | 10.1063/1.4781442 |