In situ fine tuning of bendable soft x-ray mirrors using a lateral shearing interferometer

In situ fine tuning of bendable soft x-ray mirrors using a lateral shearing interferometer

Broadly applicable, in situ at-wavelength metrology methods for x-ray optics are currently under development at the Advanced Light Source. We demonstrate the use of quantitative wavefront feedback from a lateral shearing interferometer for the suppression of aberrations. With the high sensitivity pr...

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Veröffentlicht in:Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Accelerators, spectrometers, detectors and associated equipment, 2013-05, Vol.710, p.82-86
Hauptverfasser: Merthe, Daniel J., Goldberg, Kenneth A., Yashchuk, Valeriy V., McKinney, Wayne R., Celestre, Richard, Mochi, Iacopo, MacDougall, James, Morrison, Gregory Y., Rekawa, Senajith B., Anderson, Erik, Smith, Brian V., Domning, Edward E., Padmore, Howard
Format: Artikel
Sprache:eng
Schlagworte:
Beams (radiation)
Detectors
Feedback
Interferometers
Knife-edge measurement
Metrology of x-ray optics
Shearing
Shearing interferometry
Soft x-rays
Spectrometers
Synchrotron radiation
Tuning
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Beschreibung
Zusammenfassung:Broadly applicable, in situ at-wavelength metrology methods for x-ray optics are currently under development at the Advanced Light Source. We demonstrate the use of quantitative wavefront feedback from a lateral shearing interferometer for the suppression of aberrations. With the high sensitivity provided by the interferometer we were able to optimally tune the bending couples of a single elliptical mirror (NA=2.7mrad) in order to focus a beam of soft x-rays (1.24keV) to a nearly diffraction-limited beam waist size of 156(±10)nm.
ISSN:0168-9002
1872-9576
DOI:10.1016/j.nima.2012.10.105