Improvements of crystallinity of single crystal diamond plates produced by lift-off process using ion implantation

A single crystal diamond substrate cut from a 9 mm thick ingot which was grown by chemical vapor deposition (CVD) was used to produce freestanding single crystal CVD diamond plates with improved crystallinity by the lift-off process using ion implantation. To reduce dislocations on the substrate surface, the ingot was sliced along the {100} plane parallel to the growth direction. In addition, the repeated lift-off processes reduced the surface damage on the substrate. These treatments were shown to improve the crystallinity of the CVD diamond plates produced by polarized light microscopy (PLM) and high-resolution X-ray.