Crystalline orientation dependence of electrical properties of Mn Germanide/Ge(1 1 1) and (0 0 1) Schottky contacts

We have investigated the crystalline orientation dependence of the electrical properties of Mn germanide/Ge(1 1 1) and (0 0 1) Schottky contacts. We prepared epitaxial and polycrystalline Mn 5Ge 3 layers on Ge(1 1 1) and (0 0 1) substrates, respectively. The Schottky barrier height (SBH) estimated f...

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Veröffentlicht in:Microelectronic engineering 2011-05, Vol.88 (5), p.605-609
Hauptverfasser: Nishimura, Tsuyoshi, Nakatsuka, Osamu, Akimoto, Shingo, Takeuchi, Wakana, Zaima, Shigeaki
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Sprache:eng
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Zusammenfassung:We have investigated the crystalline orientation dependence of the electrical properties of Mn germanide/Ge(1 1 1) and (0 0 1) Schottky contacts. We prepared epitaxial and polycrystalline Mn 5Ge 3 layers on Ge(1 1 1) and (0 0 1) substrates, respectively. The Schottky barrier height (SBH) estimated from the current density-voltage characteristics for epitaxial Mn 5Ge 3/Ge(1 1 1) is as low as 0.30 eV, while the SBH of polycrystalline Mn 5Ge 3/Ge(0 0 1) is higher than 0.56 eV. On the other hand, the SBH estimated from capacitance–voltage characteristics are higher than 0.6 eV for both samples. The difference of these SBHs can be explained by the local carrier conduction through the small area with the low SBH regions in the epitaxial Mn 5Ge 3/Ge(1 1 1) contact. This result suggests the possibility that the lowering SBH takes place due to Fermi level depinning in epitaxial germanide/Ge(1 1 1) contacts.
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2010.08.014