Bonding configurations in amorphous carbon and nitrogenated carbon films synthesised by femtosecond laser deposition
The effect of nitrogen addition and laser fluence on the atomic structure of amorphous carbon films (a-C) synthesized by femtosecond pulsed laser deposition has been studied. The chemical bonding in the films was investigated by means of X-ray photoelectron (XPS) and Raman spectroscopies. XPS studie...
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Veröffentlicht in: | Applied physics. A, Materials science & processing Materials science & processing, 2004-09, Vol.79 (4-6), p.1009-1014 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | The effect of nitrogen addition and laser fluence on the atomic structure of amorphous carbon films (a-C) synthesized by femtosecond pulsed laser deposition has been studied. The chemical bonding in the films was investigated by means of X-ray photoelectron (XPS) and Raman spectroscopies. XPS studies revealed a decrease in the sp bonded carbon sites and an associated increase in the N-spC bonding sites with increasing nitrogen content in the CNx films. An increase in laser fluence from 0.36 to 1.7 J/cm led to a rise in spC sites. These results were further confirmed by Raman spectroscopy. The ID/IG ratio increased monotonically and G line-width decreased with the increase of nitrogen content in the films indicating a rise in either the number or the size of the sp clusters. Furthermore a visible excitation wavelength dependence study established the resonant Raman process in a-C and CNx films. |
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ISSN: | 0947-8396 1432-0630 |
DOI: | 10.1007/s00339-004-2616-z |