Optical properties of molybdenum oxide thin films deposited by chemical vapor transport of MoO3(OH)2

MoO 3 thin films are useful for optical devices due to their electrochromic properties. In this study, deposition of MoO 2 thin films was successfully accomplished by chemical vapor transport (CVT) of volatile MoO 3 (OH) 2 . Subsequently, a MoO 3 thin film was obtained by annealing of the deposited MoO 2 at 400°C in an O 2 atmosphere. As annealing commenced, the optical transmittance of the films increased and their absorbance peaks were broadened and red-shifted due to reduced oxygen vacancy. Thus, the molybdenum oxide thin films can successfully be deposited using the CVT technique.