Three-dimensional nanostructuring with femtosecond laser pulses

The development of simple laser-based technologies for the fabrication of complicated three-dimensional (3-D) microstructures with a structure size down to 100 nm is reported. These technologies are based on nonlinear multiphoton laser-matter interaction processes allowing to overcome the diffractio...

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Veröffentlicht in:	IEEE transactions on nanotechnology 2004-12, Vol.3 (4), p.468-472
Hauptverfasser:	Korte, F., Koch, J., Serbin, J., Ovsianikov, A., Chichkov, B.N.
Format:	Artikel
Sprache:	eng
Schlagworte:	Cross-disciplinary physics: materials science rheology Dielectric materials Dielectrics Diffraction Exact sciences and technology Femtosecond Femtosecond lasers Laser ablation Lasers material processing Materials science Methods of nanofabrication Microstructure Nanocomposites Nanomaterials Nanoscale pattern formation Nanostructure Nanostructured materials Optical device fabrication Optical materials Optical pulses Physics Polymers Surface emitting lasers three-dimensional (3-D) nanostructuring Ultrafast optics
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Beschreibung
Zusammenfassung:	The development of simple laser-based technologies for the fabrication of complicated three-dimensional (3-D) microstructures with a structure size down to 100 nm is reported. These technologies are based on nonlinear multiphoton laser-matter interaction processes allowing to overcome the diffraction limit and to fabricate 3-D structures inside transparent materials. Examples on nanostructuring of metals, dielectrics, and polymers are presented.
ISSN:	1536-125X 1941-0085
DOI:	10.1109/TNANO.2004.834189