In sub(2)O sub(3) + xBaO (x=0.5-5at.%) - A novel material for trace level detection of NO sub(x) in the ambient

Indium oxide (In sub(2)O sub(3)) doped with 0.5-5at.% of Ba was examined for their response towards trace levels of NO sub(x) in the ambient. Crystallographic phase studies, electrical conductivity and sensor studies for NO sub(x) with cross interference for hydrogen, petroleum gas (PG) and ammonia...

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Veröffentlicht in:Sensors and actuators. B, Chemical Chemical, 2011-07, Vol.155 (1), p.19-27
Hauptverfasser: Shekhar, Chander, Gnanasekar, KI, Prabhu, E, Jayaraman, V, Gnanasekaran, T
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Sprache:eng
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Zusammenfassung:Indium oxide (In sub(2)O sub(3)) doped with 0.5-5at.% of Ba was examined for their response towards trace levels of NO sub(x) in the ambient. Crystallographic phase studies, electrical conductivity and sensor studies for NO sub(x) with cross interference for hydrogen, petroleum gas (PG) and ammonia were carried out. Bulk compositions with x less than or equal to 1at.% of Ba exhibited high response towards NO sub(x) with extremely low cross interference for hydrogen, PG and ammonia, offering high selectivity. Thin films of 0.5at.% Ba doped In sub(2)O sub(3) were deposited using pulsed laser deposition technique using an excimer laser (KrF) operating at a wavelength of ( lambda ) 248nm with a fluence of -3J/cm super(2) and pulsed at 10Hz. Thin film sensors exhibited better response towards 3ppm NO sub(x) quite reliably and reproducibly and offer the potential to develop NO sub(x) sensors (Threshold limit value of NO sub(2) and NO is 3 and 25ppm, respectively).
ISSN:0925-4005
DOI:10.1016/j.snb.2010.08.025