Development of SrZrO3/ZrO2 nano-composite abrasive for glass polishing

Nano-composite particles were subjected to develop a high performance abrasive for glass polishing. We focused on nano-dispersion abrasives composed of two kinds of materials; one has a high chemical reactivity with glasses and the other has a high mechanical strength. High performance in glass polishing was expected by so-called chemical mechanical polishing (CMP) effect due to combination of these two materials. The nano-dispersed SrZrO3/ZrO2 composite particles were successfully synthesized by spray pyrolysis technique. The glass polishing using SrZrO3/ZrO2 nano-composite abrasives revealed that the removal rate was relatively high and that the polished surface was quite smooth. On the other hand, the mixed abrasive with SrZrO3 and ZrO2 showed much lower polishing properties than nano-composite abrasive. The nano-dispersed structure would be of great importance to achieve CMP effect by combination of two different materials.