Vacuum-arc multilayer nanostructured TiN/Ti coatings: structure, stress state, properties

The effect of the conditions of deposition of vacuum-ac multilayer TiN/Ti coatings on their phase composition, structure, stress state and mechanical properties is investigated. Regular features of variation of the phase composition, structure-and-stress state and hardness as a function the value of the negative potential applied to the substrate during the deposition and on the thickness of the Ti and TiN layers in the multilayer coating are determined. The causes of the observed changes are analyzed using the mechanism of formation of surface layers of the vacuum-arc coatings under the conditions of the implantation processes stimulated by application of negative potential to the substrate.