Effect of the preparation conditions on the phase composition, structure, and mechanical characteristics of vacuum-Arc Zr-Ti-Si-N coatings

Regularities of the formation of the phase and structural state and mechanical characteristics of vacuum-arc coatings produced by the evaporation of Zr-Ti-Si-N targets in a reactive nitrogen atmosphere have been studied. For the targets of compositions Zr 92.0 wt %, Ti 3.9 wt %, Si 4.1 wt %, and Zr 64.2 wt %, Ti 32.1 wt %, Si 3.7 % at a working pressure of the nitrogen atmosphere of 0.1-0.8 Pa and a potential at the substrate of −100 and −200 V, the formation of a single-phase crystalline state of the coatings (nitride of the solid solution of the components of the target) has been established. The size of crystallites is in the nanometer range (25–85 nm). An increase in the size of crystallites in the direction of the incidence of the film-forming particles (perpendicular to the growth plane) is favored by an increase in the bias potential from −100 to −200 V. The low heat conductivity of the metallic (Ti and Zr) components of the target leads to a significant content of a droplet phase when using the direct-flow regime of the vacuum-arc deposition and requires the employment of a technological scheme with a separation of the film-forming beams to increase the homogeneity of the high mechanical properties of the coatings. The use of film-forming beams separated from the droplet phase makes it possible to increase the homogeneity of the surface morphology of the coatings with the retention of a large index of plasticity ( H / E = 0.8–0.9) and high hardness (33–37 GPa) of the material of the coating.