Imprinting the nanostructures on the high refractive index semiconductor glass

► High aspect ratio nano-replication onto the surface of glass and of semiconductor. ► Nanoimprinting less than 100 nm pitch structures on the surface of glass and of semiconductor. ► Nano-replicated high refractive index semiconductor glass for application in photonic crystals, sub-microelectronic...

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Veröffentlicht in:Applied surface science 2011-05, Vol.257 (15), p.6829-6832
Hauptverfasser: Silvennoinen, M., Paivasaari, K., Kaakkunen, J.J.J., Tikhomirov, V.K., Lehmuskero, A., Vahimaa, P., Moshchalkov, V.V.
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container_end_page 6832
container_issue 15
container_start_page 6829
container_title Applied surface science
container_volume 257
creator Silvennoinen, M.
Paivasaari, K.
Kaakkunen, J.J.J.
Tikhomirov, V.K.
Lehmuskero, A.
Vahimaa, P.
Moshchalkov, V.V.
description ► High aspect ratio nano-replication onto the surface of glass and of semiconductor. ► Nanoimprinting less than 100 nm pitch structures on the surface of glass and of semiconductor. ► Nano-replicated high refractive index semiconductor glass for application in photonic crystals, sub-microelectronic chips and moth eye structures. The centimeter range one- and two-dimensional nanostructures of 70 nm pitch have been imprinted by hot pressing with a quartz, silicon or nickel mold, at 240 °C, onto the surface of Ge 20As 20Se 14Te 46 semiconductor glass. Excellent glass stability of this glass allows multiple re-pressing of the nano-structures. With increasing the Te/Se ratio in the glass formula, the refractive index reaches a value of 3.5 with an option of free electron absorption at elevated temperatures pointing out the use of such nanostructures in submicron and micron scale electronic devices/chips, moth eye structures and photonic crystals.
doi_str_mv 10.1016/j.apsusc.2011.03.007
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source ScienceDirect Journals (5 years ago - present)
subjects (160.2750) Glass and other amorphous materials
(160.4236) Nanomaterials
(220.4000) Microstructure fabrication
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Glass
Moths
Nanocomposites
Nanomaterials
Nanostructure
Physics
Refractive index
Refractivity
Semiconductors
title Imprinting the nanostructures on the high refractive index semiconductor glass
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