Varifocal liquid lenses with integrated actuator, high focusing power and low operating voltage fabricated on 200 mm wafers

We developed an innovative type of varifocal liquid lens actuated by electrostatic parallel plates. The 3 mm diameter lens is made of a polymer membrane that encapsulates a high permittivity liquid in a cavity on top of a glass wafer. Annular electrodes situated below the membrane and on the glass w...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2011-12, Vol.172 (1), p.280-286
Hauptverfasser:	Pouydebasque, Arnaud, Bridoux, Claudine, Jacquet, Fabrice, Moreau, Stephane, Sage, Eric, Saint-Patrice, Damien, Bouvier, Christophe, Kopp, Christophe, Marchand, Gilles, Bolis, Sebastien, Sillon, Nicolas, Vigier-Blanc, Emmanuelle
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuators Electric potential Electrostatics Lenses Liquids Membranes Voltage Wafers
Online-Zugang:	Volltext
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