Varifocal liquid lenses with integrated actuator, high focusing power and low operating voltage fabricated on 200 mm wafers

We developed an innovative type of varifocal liquid lens actuated by electrostatic parallel plates. The 3 mm diameter lens is made of a polymer membrane that encapsulates a high permittivity liquid in a cavity on top of a glass wafer. Annular electrodes situated below the membrane and on the glass wafer form the electrostatic parallel plates actuator. By applying a voltage between the electrodes, the electrostatic actuation generated reduces the gap and pushes the liquid towards the center of the lens changing the curvature of the membrane. Compared to previous liquid lenses, very compact devices ( less than or equal to 6 mm x 6 mm x 0.7 mm) working at a reduced supply voltage (