Varifocal liquid lenses with integrated actuator, high focusing power and low operating voltage fabricated on 200 mm wafers
We developed an innovative type of varifocal liquid lens actuated by electrostatic parallel plates. The 3 mm diameter lens is made of a polymer membrane that encapsulates a high permittivity liquid in a cavity on top of a glass wafer. Annular electrodes situated below the membrane and on the glass w...
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| Veröffentlicht in: | Sensors and actuators. A. Physical. 2011-12, Vol.172 (1), p.280-286 |
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| container_title | Sensors and actuators. A. Physical. |
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| creator | Pouydebasque, Arnaud Bridoux, Claudine Jacquet, Fabrice Moreau, Stephane Sage, Eric Saint-Patrice, Damien Bouvier, Christophe Kopp, Christophe Marchand, Gilles Bolis, Sebastien Sillon, Nicolas Vigier-Blanc, Emmanuelle |
| description | We developed an innovative type of varifocal liquid lens actuated by electrostatic parallel plates. The 3 mm diameter lens is made of a polymer membrane that encapsulates a high permittivity liquid in a cavity on top of a glass wafer. Annular electrodes situated below the membrane and on the glass wafer form the electrostatic parallel plates actuator. By applying a voltage between the electrodes, the electrostatic actuation generated reduces the gap and pushes the liquid towards the center of the lens changing the curvature of the membrane. Compared to previous liquid lenses, very compact devices ( less than or equal to 6 mm x 6 mm x 0.7 mm) working at a reduced supply voltage ( |
| doi_str_mv | 10.1016/j.sna.2011.05.005 |
| format | Article |
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The 3 mm diameter lens is made of a polymer membrane that encapsulates a high permittivity liquid in a cavity on top of a glass wafer. Annular electrodes situated below the membrane and on the glass wafer form the electrostatic parallel plates actuator. By applying a voltage between the electrodes, the electrostatic actuation generated reduces the gap and pushes the liquid towards the center of the lens changing the curvature of the membrane. Compared to previous liquid lenses, very compact devices ( less than or equal to 6 mm x 6 mm x 0.7 mm) working at a reduced supply voltage (<25 V) are demonstrated. Wave front measurements indicate an optical power change of 8 m super(-1 at 22 V) sub(R)MS that can be further improved. 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| ispartof | Sensors and actuators. A. Physical., 2011-12, Vol.172 (1), p.280-286 |
| issn | 0924-4247 |
| language | eng |
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| source | ScienceDirect Journals (5 years ago - present) |
| subjects | Actuators Electric potential Electrostatics Lenses Liquids Membranes Voltage Wafers |
| title | Varifocal liquid lenses with integrated actuator, high focusing power and low operating voltage fabricated on 200 mm wafers |
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