Sandwich Structure Type RF-MEMS Variable Capacitor with Low Voltage Controllability and Wide Tuning Range

A sandwich structure type RF-MEMS variable capacitor is proposed, that consists of a movable middle plate, and fixed top and bottom plates having different areas. Simulation results show that the proposed capacitor can operate at a control voltage of less than 3.2V; it achieves a tuning range of 4.8...

Ausführliche Beschreibung