Sandwich Structure Type RF-MEMS Variable Capacitor with Low Voltage Controllability and Wide Tuning Range

A sandwich structure type RF-MEMS variable capacitor is proposed, that consists of a movable middle plate, and fixed top and bottom plates having different areas. Simulation results show that the proposed capacitor can operate at a control voltage of less than 3.2V; it achieves a tuning range of 4.8...

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Veröffentlicht in:	IEICE Transactions on Communications 2008/02/01, Vol.E91.B(2), pp.572-574
Hauptverfasser:	NISHIMOTO, Takuma, YAMASHITA, Kiichi, OHHATA, Kenichi
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Capacitors Compound structure devices Controllability Electric potential Electronics Exact sciences and technology MEMS Micro- and nanoelectromechanical devices (mems/nems) Plates (structural members) RF-MEMS Sandwich structures Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Simulation Tuning variable capacitor Voltage
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Beschreibung
Zusammenfassung:	A sandwich structure type RF-MEMS variable capacitor is proposed, that consists of a movable middle plate, and fixed top and bottom plates having different areas. Simulation results show that the proposed capacitor can operate at a control voltage of less than 3.2V; it achieves a tuning range of 4.8:1 (capacitance: 630-130fF) in the range of 0 to 3.2V and at a frequency of 7.5GHz.
ISSN:	0916-8516 1745-1345 1745-1345
DOI:	10.1093/ietcom/e91-b.2.572