Schedulability Analysis and Optimal Scheduling of Dual-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation
With wafer residency time constraint of cluster tools in semiconductor manufacturing, activity time variation can make an originally feasible schedule infeasible. Thus, it is difficult to schedule them and schedulability is a vitally important issue. With bounded activity time variation considered,...
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| Veröffentlicht in: | IEEE transactions on automation science and engineering 2012-01, Vol.9 (1), p.203-209 |
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| creator | Wu, N Zhou, M |
| description | With wafer residency time constraint of cluster tools in semiconductor manufacturing, activity time variation can make an originally feasible schedule infeasible. Thus, it is difficult to schedule them and schedulability is a vitally important issue. With bounded activity time variation considered, this paper addresses their real-time scheduling issues and conducts their schedulability analysis. A Petri net (PN) model and a control policy are presented. Based on them, this paper derives closed-form schedulability conditions. If schedulable, an algorithm is developed to obtain an offline periodic schedule. This schedule together with the control policy forms a real-time schedule. It is optimal in terms of cycle time and can be analytically computed, which represents significant advance in this area. |
| doi_str_mv | 10.1109/TASE.2011.2160452 |
| format | Article |
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Thus, it is difficult to schedule them and schedulability is a vitally important issue. With bounded activity time variation considered, this paper addresses their real-time scheduling issues and conducts their schedulability analysis. A Petri net (PN) model and a control policy are presented. Based on them, this paper derives closed-form schedulability conditions. If schedulable, an algorithm is developed to obtain an offline periodic schedule. This schedule together with the control policy forms a real-time schedule. It is optimal in terms of cycle time and can be analytically computed, which represents significant advance in this area.</description><subject>Algorithms</subject><subject>Applied sciences</subject><subject>Automated manufacturing systems</subject><subject>Cluster analysis</subject><subject>cluster tools</subject><subject>Clusters</subject><subject>Computer science; control theory; systems</subject><subject>Control system analysis</subject><subject>Control theory. 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Computer integrated manufacturing</subject><subject>Production scheduling</subject><subject>Real time</subject><subject>Real-time systems</subject><subject>Robots</subject><subject>Schedules</subject><subject>Scheduling</subject><subject>Semiconductor device modeling</subject><subject>semiconductor fabrication</subject><subject>Semiconductors</subject><subject>Time</subject><subject>Time factors</subject><issn>1545-5955</issn><issn>1558-3783</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2012</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNpdkcGKFDEQhhtRcF19APESBMFLj5Wk0-kcm3F1FxYW3FGPIZOudrNkkjFJC3P2xe2eGfbgKQX1_RX4v6p6S2FFKahPm_7-asWA0hWjLTSCPasuqBBdzWXHny9zI2qhhHhZvcr5EYA1nYKL6u-9fcBh8mbrvCsH0gfjD9llYsJA7vbF7YwnZ8aFXySO5PNkfN2nHVn7KRdMZBOjz-SnKw_kG2Y3YLAHsnE7JOsYcknGhXK819vi_iy_HJc_THKmuBheVy9G4zO-Ob-X1fcvV5v1dX179_Vm3d_WtgFe6nYLVHFsGVODkUx0TbvlLYw4AlqOjbFyHDrJFdBOUg6AVAIdAAe2paiQX1YfT3f3Kf6eMBe9c9mi9yZgnLKm7Rxb6pMz-v4_9DFOae4ma0UbCdAcIXqCbIo5Jxz1Ps19pYOmoBcrerGiFyv6bGXOfDgfNtkaPyYTrMtPQSZmLSfu3YlziPi0ngVK1in-D-hmldk</recordid><startdate>201201</startdate><enddate>201201</enddate><creator>Wu, N</creator><creator>Zhou, M</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><general>The Institute of Electrical and Electronics Engineers, Inc. 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| ispartof | IEEE transactions on automation science and engineering, 2012-01, Vol.9 (1), p.203-209 |
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| subjects | Algorithms Applied sciences Automated manufacturing systems Cluster analysis cluster tools Clusters Computer science control theory systems Control system analysis Control theory. Systems Delay effects discrete-event systems Exact sciences and technology Mathematical analysis Optimal control Optimal scheduling Optimization Petri nets (PNs) Policies Process control. Computer integrated manufacturing Production scheduling Real time Real-time systems Robots Schedules Scheduling Semiconductor device modeling semiconductor fabrication Semiconductors Time Time factors |
| title | Schedulability Analysis and Optimal Scheduling of Dual-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation |
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