Effects of a Pt underlayer and interlayer on the growth texture of strontium ferrite thin films
The effects of a Pt underlayer and a Pt interlayer on the textured growth of the sputtered strontium ferrite (SrM) films were investigated. The structural and magnetic properties of SrM films on the Pt underlayers were compared with SrM films on thermally oxidized Si substrates. It was found that mu...
Gespeichert in:
Veröffentlicht in: | IEEE transactions on magnetics 2000-09, Vol.36 (5), p.2942-2944 |
---|---|
Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The effects of a Pt underlayer and a Pt interlayer on the textured growth of the sputtered strontium ferrite (SrM) films were investigated. The structural and magnetic properties of SrM films on the Pt underlayers were compared with SrM films on thermally oxidized Si substrates. It was found that much better [001] texture was obtained on the films with Pt underlayers, as indicated by the strong [006], [008] and (0014) reflections from X-ray diffraction (XRD) measurement. A Pt interlayer was also found to further improve the [001] texture. |
---|---|
ISSN: | 0018-9464 1941-0069 |
DOI: | 10.1109/20.908635 |