Dynamic characterization of thin aluminum nitride microstructures

Dynamic characterization of thin aluminum nitride microstructures

In this work we report on the mechanical and material properties of membranes made of AlN and nanodiamond for the use in tunable micro‐optics. AlN membranes with and without metal contacts have been studied in dynamic mode by laser Doppler vibrometry. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, We...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Physica status solidi. C 2011-02, Vol.8 (2), p.479-481
Hauptverfasser: Knöbber, F., Bludau, O., Röhlig, C.-C., Sah, R. E., Williams, O. A., Kirste, L., Leopold, S., Pätz, D., Cimalla, V., Ambacher, O., Lebedev, V.
Format: Artikel
Sprache:eng
Schlagworte:
AlN
Aluminum nitride
Doppler effect
Dynamic tests
Dynamics
membrane
Membranes
Nanocomposites
nanodiamond
Nanostructure
piezoelectric MEMS
Solid state physics
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:In this work we report on the mechanical and material properties of membranes made of AlN and nanodiamond for the use in tunable micro‐optics. AlN membranes with and without metal contacts have been studied in dynamic mode by laser Doppler vibrometry. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
ISSN:1862-6351
1610-1642
1610-1642
DOI:10.1002/pssc.201000512