Gas sensing of colloidal polyaniline in a chemoresistor consisting of nanometer electrodes
The high conductivity of colloid-conducting polymers is explained by the networking structures and the hopping mechanisms of the metallic particles [1,2,4]. To observe how the metallic region and the networking structures differ in sensing NH 3 gas, E-beam lithography and electromigration were used...
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Veröffentlicht in: | Microelectronic engineering 2011-09, Vol.88 (9), p.3035-3042 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | The high conductivity of colloid-conducting polymers is explained by the networking structures and the hopping mechanisms of the metallic particles
[1,2,4]. To observe how the metallic region and the networking structures differ in sensing NH
3 gas, E-beam lithography and electromigration were used to make chemoresistors with nanometer-gap electrodes. Colloid Pani was coated on a nanometer gap as a reaction matrix for the gas. The
I–
V curves were measured in a vacuum and the NH
3 gas was nonlinear. In sensors with a gap of less than 10
nm, there was a two- or threefold increase in the conductivity, and the work function decreased from 600
meV in a vacuum to 250
meV in NH
3 gas. In contrast, the conductivity of sensors with gaps of 200 and 500
nm decreased to 1/1000 in the NH
3 gas environment. The decrease of the conductivity can be explained by electron–hole annihilation, which appears to occur on the surface of the secondary particles. With comb-type electrodes, the operating voltage can be decreased by three orders of magnitude. In electrodes with 200 and 500
nm gaps, the
I–
V has a step-type response to NH
3 gas. |
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ISSN: | 0167-9317 1873-5568 |
DOI: | 10.1016/j.mee.2011.05.003 |