High accuracy method for Auger analysis of the composition of uncleaned silicon oxide surface

High accuracy method for Auger analysis of the composition of uncleaned silicon oxide surface

A new procedure is described for preparing standard spectra of the inverse self-convolution of the density of states for silicon oxide required for performing non-destructive quantitative Auger analysis of SiO sub(x). Research results are used for determining the composition of silicon oxide formed...

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Veröffentlicht in:Measurement techniques 2004-10, Vol.47 (10), p.1032-1038
Hauptverfasser: Kostishko, B. M., Appolonov, S. V., Salomatin, S. Ya
Format: Artikel
Sprache:eng
Schlagworte:
Annealing
Augers
Etching
Inverse
Nondestructive testing
Silicon oxides
Spectra
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Beschreibung
Zusammenfassung:A new procedure is described for preparing standard spectra of the inverse self-convolution of the density of states for silicon oxide required for performing non-destructive quantitative Auger analysis of SiO sub(x). Research results are used for determining the composition of silicon oxide formed at the surface of quantum threads in porous silicon with high-temperature annealing in a hydrogen atmosphere and during water etching.
ISSN:0543-1972
1573-8906
DOI:10.1007/s11018-005-0053-9