Work function control of functionally graded ZnO+Ga2O3 thin film for OLED applications

Work function control of functionally graded ZnO+Ga2O3 thin film for OLED applications

ZnO + Ga2O3 functionally graded thin films (FGTFs) were investigated for their potential use as organic light emitting diodes (OLEDs). FGTF transparent conducting oxides (TCO) were fabricated by combinatorial RF magnetron sputtering. The composition gradient was controlled up to 10% by changing the...

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Veröffentlicht in:Current applied physics 2011-01, Vol.11 (1), p.S255-S257
Hauptverfasser: Choi, Seok Eui, Oh, Yong Taeg, Ham, Hyo Kyun, Kim, Tae Won, Heo, Gi Seok, Park, Jong Woon, Choi, Bum Ho, Chan Shin, Dong
Format: Artikel
Sprache:eng
Schlagworte:
Combinatorial analysis
Contact resistance
Devices
Functionally gradient materials
Magnetron sputtering
Thin films
Work functions
Zinc oxide
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Zusammenfassung:ZnO + Ga2O3 functionally graded thin films (FGTFs) were investigated for their potential use as organic light emitting diodes (OLEDs). FGTF transparent conducting oxides (TCO) were fabricated by combinatorial RF magnetron sputtering. The composition gradient was controlled up to 10% by changing the plasma power of the two sputter guns. A Ga2O3 + ZnO graded region was placed on top of the ZnO layer. The FGTFs showed up to 80% transmittance. Their surface resistances were reduced to
ISSN:1567-1739
DOI:10.1016/j.cap.2010.11.025