High resolution double-sided diffractive optics for hard X-ray microscopy
The fabrication of high aspect ratio metallic nanostructures is crucial for the production of efficient diffractive X-ray optics in the hard X-ray range. We present a novel method to increase their structure height via the double-sided patterning of the support membrane. In transmission, the two Fre...
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Veröffentlicht in: | Optics express 2015-01, Vol.23 (2), p.776-786 |
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creator | Mohacsi, Istvan Vartiainen, Ismo Guizar-Sicairos, Manuel Karvinen, Petri Guzenko, Vitaliy A Müller, Elisabeth Färm, Elina Ritala, Mikko Kewish, Cameron M Somogyi, Andrea David, Christian |
description | The fabrication of high aspect ratio metallic nanostructures is crucial for the production of efficient diffractive X-ray optics in the hard X-ray range. We present a novel method to increase their structure height via the double-sided patterning of the support membrane. In transmission, the two Fresnel zone plates on the two sides of the substrate will act as a single zone plate with added structure height. The presented double-sided zone plates with 30 nm smallest zone width offer up to 9.9% focusing efficiency at 9 keV, that results in a factor of two improvement over their previously demonstrated single-sided counterparts. The increase in efficiency paves the way to speed up X-ray microscopy measurements and allows the more efficient utilization of the flux in full-field X-ray microscopy. |
doi_str_mv | 10.1364/OE.23.000776 |
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title | High resolution double-sided diffractive optics for hard X-ray microscopy |
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