High resolution double-sided diffractive optics for hard X-ray microscopy

The fabrication of high aspect ratio metallic nanostructures is crucial for the production of efficient diffractive X-ray optics in the hard X-ray range. We present a novel method to increase their structure height via the double-sided patterning of the support membrane. In transmission, the two Fre...

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Veröffentlicht in:Optics express 2015-01, Vol.23 (2), p.776-786
Hauptverfasser: Mohacsi, Istvan, Vartiainen, Ismo, Guizar-Sicairos, Manuel, Karvinen, Petri, Guzenko, Vitaliy A, Müller, Elisabeth, Färm, Elina, Ritala, Mikko, Kewish, Cameron M, Somogyi, Andrea, David, Christian
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Sprache:eng
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Zusammenfassung:The fabrication of high aspect ratio metallic nanostructures is crucial for the production of efficient diffractive X-ray optics in the hard X-ray range. We present a novel method to increase their structure height via the double-sided patterning of the support membrane. In transmission, the two Fresnel zone plates on the two sides of the substrate will act as a single zone plate with added structure height. The presented double-sided zone plates with 30 nm smallest zone width offer up to 9.9% focusing efficiency at 9 keV, that results in a factor of two improvement over their previously demonstrated single-sided counterparts. The increase in efficiency paves the way to speed up X-ray microscopy measurements and allows the more efficient utilization of the flux in full-field X-ray microscopy.
ISSN:1094-4087
DOI:10.1364/OE.23.000776