X-ray fluorescence evaluation of the surface density of vanadium nanolayers on various substrates

An auxiliary system in the form of thin vanadium layers on polymer film substrates has been used in surface density determinations. We have calculated correction coefficients that take into account the absorption of the primary radiation of an X-ray tube and that of analytical lines of the elements present in the substrate. A technique has been developed that allows one to determine the surface density of thin films when samples and references are located on substrates from different materials.