46.5L: Late-News Paper: Large Area Sputtered Al sub(2)O sub(3) Films for High Mobility AM-TFT Backplanes on PVD Array System PiVot 55kVi super(2)

The production worthiness of sputtered Al sub(2)O sub(3) barrier films on Gen 8.5 substrates using rotary targets on PVD array system PiVot(TM) is demonstrated in order to provide increased stability to IGZO AM-OLED backplanes. The achieved Al sub(2)O sub(3) layer properties and uniformity illustrat...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	SID International Symposium Digest of technical papers 2013-06, Vol.44 (1), p.647-650
Hauptverfasser:	Kloeppel, Andreas, Liu, Jian, Scheer, Evelyn
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum oxide Arrays Backplanes Physical vapor deposition Pivots Stability Technical papers Variability
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	The production worthiness of sputtered Al sub(2)O sub(3) barrier films on Gen 8.5 substrates using rotary targets on PVD array system PiVot(TM) is demonstrated in order to provide increased stability to IGZO AM-OLED backplanes. The achieved Al sub(2)O sub(3) layer properties and uniformity illustrate the advantages of using rotary technology.
ISSN:	0097-966X 2168-0159
DOI:	10.1002/j.2168-0159.2013.tb06294.x