Planarised optical fiber composite using flame hydrolysis deposition demonstrating an integrated FBG anemometer

This paper reports for the first time a planarised optical fiber composite formed using Flame Hydrolysis Deposition (FHD). As a way of format demonstration a Micro-Opto-Electro-Mechanical (MOEMS) hot wire anemometer is formed using micro-fabrication processing. The planarised device is rigidly secured to a silicon wafer using optical quality doped silica that has been deposited using flame hydrolysis and consolidated at high temperature. The resulting structure can withstand temperatures exceeding 580K and is sensitive enough to resolve free and forced convection interactions at low fluid velocity.