Screen-offset printing for fine conductive patterns

Screen printing is a useful method for fabricating electrodes or signal wires of electronic devices. However, finer patterns, e.g., 50- mu m-wide, are difficult to form. Herein, we introduce a newly developed printing technique called "screen-offset printing," as a candidate method for sol...

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Veröffentlicht in:Microelectronic engineering 2014-07, Vol.123, p.58-61
Hauptverfasser: NOMURA, Ken-Ichi, USHIJIMA, Hirobumi, MITSUI, Ryosuke, TAKAHASHI, Seiya, NAKAJIMA, Shin-Ichiro
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Sprache:eng
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Zusammenfassung:Screen printing is a useful method for fabricating electrodes or signal wires of electronic devices. However, finer patterns, e.g., 50- mu m-wide, are difficult to form. Herein, we introduce a newly developed printing technique called "screen-offset printing," as a candidate method for solving this problem. In this process, first, ink patterns are screen-printed on a silicone-resin blanket; they are then transferred from the blanket to an object. In the present study, we analyze the features of screen-offset printing by observing printed conductive patterns, and elucidate the impact of this method by comparing the experimental results of screen-offset printing and conventional screen printing. In addition, we demonstrate the fabrication of fine patterns with a line and space (L/S) of 50/50 and 30/30 mu m.
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2014.05.009