Micro-Machined Gyroscope Mathematical Model and Error Analysis

The micro-machined gyroscope that uses Coriolis force to measure angular velocity has non-linear error,which makes the amplitude of angular velocity have a relationship with its frequency,and fabrication technology error,which leads gyroscope’s drive shaft and detection shaft not to be vertical.All kinds of errors severely restrict this kind of gyroscope’s measuring accuracy and application range.This article obtained the reason for the formation of all kind of gyroscope’s errors and their mathematical expressions through analyzing the principle of micromachined gyroscope,which uses Coriolis force to measure angular velocity.At the same time,the gyroscope mathematical model was established and used to emulate to analyze each error’s influence on the angular velocity measured by gyroscope.The conclusion obtained by theoretical analysis and simulation provides the basis for gyroscope’s error analysis and elimination,and it has an important significance in improving the measuring accuracy of gyroscope.