Research of the PZT Polarization for Deformable Mirror

Research of the PZT Polarization for Deformable Mirror

This paper demonstrates that the deformation of the piezoelectric deformable mirror (DM) is proportional to the transverse piezoelectric coefficient of the lead zirconate titanate (PZT) by the theoretical analysis. The optimal polarization conditions were obtained by experiments to optimize the perf...

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Veröffentlicht in:Key engineering materials 2014-04, Vol.609-610, p.1331-1335
Hauptverfasser: Chen, Jun Jie, Li, Bao Qing, Ma, Jian Qiang, Chu, Jia Ru, Liu, Ying, Deng, Ji Cong
Format: Artikel
Sprache:eng
Schlagworte:
Coefficients
Deformable mirrors
Deformation
Lead zirconate titanates
Optimization
Piezoelectricity
Polarization
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Zusammenfassung:This paper demonstrates that the deformation of the piezoelectric deformable mirror (DM) is proportional to the transverse piezoelectric coefficient of the lead zirconate titanate (PZT) by the theoretical analysis. The optimal polarization conditions were obtained by experiments to optimize the performance of the DM. After the optimal polarization, the transverse piezoelectric coefficient of the PZT film increases from 350 pm/V to 431 pm/V, which will improve the deformation of the DM.
ISSN:1013-9826
1662-9795
1662-9795
DOI:10.4028/www.scientific.net/KEM.609-610.1331