Cantilever Piezoelectric Micro-Pump Modeling Based on Bond Graph Port

Micro-pump is a fundamental component of micro-fluid machine, which has obtained an extensive use in medical care, bio-engineering, and the other fields. Its application will continuously be expanded. Its structure is different from the conventional mechanical pump as its size and flow limit, thus it is difficult to directly apply traditional method to micro-pump modeling. Firstly, the paper introduces the structure of the cantilever piezoelectric micro-pump, in which its input/output can be seen as two separate one-way valves, and its structure can be simplified for a simple beam model. Secondly, presents a port model based on bond graph port analysis, and selects the basic components in order to understand the micro-fluid characteristics of the micro-pump. Finally, gives the result of simulation to obtain the process of the volume change of micro-pump companying with the input pressure and the displacement of deformable film..