Rewriting of low electrical resistance lines on TiO2 film by writing and erasing with femtosecond and CW fiber lasers

•A rewriting process on TiO2 film was developed with femtosecond and CW fiber lasers.•Low electrical resistance lines are written on TiO2 film with a femtosecond laser.•Low electrical resistance lines are erased on TiO2 film with a CW fiber laser.•Low electrical resistance lines can be rewritten wit...

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Veröffentlicht in:Applied surface science 2014-09, Vol.313, p.730-735
Hauptverfasser: Tsukamoto, Masahiro, Nishii, Ryosuke, Muraki, Yu, Shinonaga, Togo, Yoshida, Minoru, Takahashi, Masanari, Abe, Nobuyuki
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Sprache:eng
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Zusammenfassung:•A rewriting process on TiO2 film was developed with femtosecond and CW fiber lasers.•Low electrical resistance lines are written on TiO2 film with a femtosecond laser.•Low electrical resistance lines are erased on TiO2 film with a CW fiber laser.•Low electrical resistance lines can be rewritten with a femtosecond laser. A rewriting process was developed for reduced electrical resistance lines on a titanium dioxide (TiO2) film with femtosecond and CW fiber lasers. In this process, lines are written on TiO2 film by femtosecond laser irradiation, where the lines have a lower electrical resistance than the surrounding film. By heating with a CW fiber laser in air, the low electrical resistance lines are erased and their electrical resistances increase. When the erased areas on the TiO2 film are irradiated with the femtosecond laser, the lower electrical resistance lines can be rewritten on the film surface.
ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2014.06.062