Room temperature pulsed laser deposited ZnO thin films as photoluminiscence gas sensors

[Display omitted] ► Elaboration of functional ZnO thin films by PLD at room temperature is possible. ► Fluorescence quenching of ZnO thin films may be used for NO2 sensors. ► Addition of oxygen during deposition is required to get films of better quality. ► Films exhibited linear behaviour in the range between 26 and 100ppm. Zinc oxide thin films with optical sensing capabilities for NO2 have been elaborated by pulsed laser deposition (PLD) onto glass substrates at room temperature with Nd:YAG laser (1064nm). Morphology, chemical composition and optical characteristics of the films were evaluated as a function of laser fluence, gas pressure and target-to-substrate distance. Films exhibit excellent morphological and optical (transmittance and photoluminescence) properties. The films have been evaluated as fluorescence sensors for NO2 in the concentration range between 26 and 200ppm.