XRD and XPS Analysis of TiO sub(2) Thin Films Annealed in Different Environments

Undoped and Nb-doped TiO sub(2) thin films have been fabricated on glass substrate by RF magnetron sputtering. The morphologic, structural and surface composition of these films before and after annealing in different environments were investigated by atomic force microscopy (AFM) imaging, X-ray dif...

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Veröffentlicht in:	Journal of materials science and engineering. B 2014-06, Vol.4 (6B)
Hauptverfasser:	Potlog, Tamara, Dumitriu, Petru, Dobromir, Marius, Luca, Dumitru
Format:	Artikel
Sprache:	eng
Schlagworte:	Annealing Atomic force microscopy Niobium Thin films Titanium dioxide X-ray diffraction X-ray photoelectron spectroscopy X-rays
Online-Zugang:	Volltext
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