XRD and XPS Analysis of TiO sub(2) Thin Films Annealed in Different Environments

Undoped and Nb-doped TiO sub(2) thin films have been fabricated on glass substrate by RF magnetron sputtering. The morphologic, structural and surface composition of these films before and after annealing in different environments were investigated by atomic force microscopy (AFM) imaging, X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). The XRD data reveal that the crystallinity is improved when the films are Nb-doped and annealed in H2 environment. The TiO sub(2) thin films annealed in H sub(2) environment exhibit only the anatase phase. The XPS analysis of TiO sub(2) with Nb indicates the maximum shift in binding energy of the Ti 2p peak. A mechanism for the incorporation of Nb in the TiO sub(2) lattice has been proposed.