Nanocoral ZnO films fabricated on flexible poly(vinyl chloride) using a carrier substrate

Nanocoral ZnO films on flexible poly(vinyl chloride) (PVC) were fabricated using a three step approach including (1) sputter deposition of a porous Zn film onto a sacrificial Si carrier substrate, (2) formation of the nanocoral ZnO film through annealing in an oxygen flow at temperatures greater tha...

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Veröffentlicht in:Thin solid films 2014-01, Vol.550, p.145-148
Hauptverfasser: Borysiewicz, Michał A., Wojciechowski, Tomasz, Dynowska, Elżbieta, Wielgus, Maciej, Bar, Jan, Wojtowicz, Tomasz, Kamińska, Eliana, Piotrowska, Anna
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container_end_page 148
container_issue
container_start_page 145
container_title Thin solid films
container_volume 550
creator Borysiewicz, Michał A.
Wojciechowski, Tomasz
Dynowska, Elżbieta
Wielgus, Maciej
Bar, Jan
Wojtowicz, Tomasz
Kamińska, Eliana
Piotrowska, Anna
description Nanocoral ZnO films on flexible poly(vinyl chloride) (PVC) were fabricated using a three step approach including (1) sputter deposition of a porous Zn film onto a sacrificial Si carrier substrate, (2) formation of the nanocoral ZnO film through annealing in an oxygen flow at temperatures greater than 400°C and (3) transfer of the film to an adhesive-coated PVC substrate with subsequent removal of the Si carrier. The proposed approach enables the fabrication of porous ZnO films requiring high temperature preparation on flexible polymer-based substrates which would otherwise degrade at high temperatures. •Way of porous ZnO film fabrication on flexible poly(vinyl chloride) (PVC) is presented.•Fabrication: sputter deposition on Si, annealing, film detachment & transfer to PVC.•Film detachment was made possible by strain engineering in ZnO films.
doi_str_mv 10.1016/j.tsf.2013.10.127
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source Elsevier ScienceDirect Journals
subjects Carriers
Chlorides
Cross-disciplinary physics: materials science
rheology
Deposition
Deposition by sputtering
Exact sciences and technology
Flexible substrates
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Nanoscale materials and structures: fabrication and characterization
Nanostructure
Nanostructures
Other topics in nanoscale materials and structures
Physics
Poly(vinyl chloride)
Polyvinyl chlorides
Silicon substrates
Sputtering deposition
Thin films
Zinc oxide
title Nanocoral ZnO films fabricated on flexible poly(vinyl chloride) using a carrier substrate
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