Nanocoral ZnO films fabricated on flexible poly(vinyl chloride) using a carrier substrate
Nanocoral ZnO films on flexible poly(vinyl chloride) (PVC) were fabricated using a three step approach including (1) sputter deposition of a porous Zn film onto a sacrificial Si carrier substrate, (2) formation of the nanocoral ZnO film through annealing in an oxygen flow at temperatures greater tha...
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Veröffentlicht in: | Thin solid films 2014-01, Vol.550, p.145-148 |
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Hauptverfasser: | , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Nanocoral ZnO films on flexible poly(vinyl chloride) (PVC) were fabricated using a three step approach including (1) sputter deposition of a porous Zn film onto a sacrificial Si carrier substrate, (2) formation of the nanocoral ZnO film through annealing in an oxygen flow at temperatures greater than 400°C and (3) transfer of the film to an adhesive-coated PVC substrate with subsequent removal of the Si carrier. The proposed approach enables the fabrication of porous ZnO films requiring high temperature preparation on flexible polymer-based substrates which would otherwise degrade at high temperatures.
•Way of porous ZnO film fabrication on flexible poly(vinyl chloride) (PVC) is presented.•Fabrication: sputter deposition on Si, annealing, film detachment & transfer to PVC.•Film detachment was made possible by strain engineering in ZnO films. |
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ISSN: | 0040-6090 1879-2731 |
DOI: | 10.1016/j.tsf.2013.10.127 |