A study on (K, Na) NbO sub(3) based multilayer piezoelectric ceramics micro speaker

A flat panel micro speaker was fabricated from (K, Na) NbO sub(3) (KNN)-based multilayer piezoelectric ceramics by a tape casting and cofiring process using Ag-Pd alloys as an inner electrode. The interface between ceramic and electrode was investigated by scanning electron microscope (SEM) and transmission electron microscope (TEM). The acoustic response was characterized by a standard audio test system. We found that the micro speaker with dimensions of 23 x 27 x 0.6 mm super(3), using three layers of 30 [mu]m thickness KNN-based ceramic, has a high average sound pressure level (SPL) of 87 dB, between 100 Hz-20 kHz under five voltage. This result was even better than that of lead zirconate titanate (PZT)-based ceramics under the same conditions. The experimental results show that the KNN-based multilayer ceramics could be used as lead free piezoelectric micro speakers.